Wafer degas infrared heater

Tue, 23 Jun 2026 13:24:40 +0800

On the fab floor, a soft bake that drifts even half a degree will wreck photoresist uniformity. The line stops. Yield drops. We built our wafer degas infrared heaters to stop that drift before it even shows up. What matters under the hood We design these heaters for ±0.1°C steady-state uniformity across the chuck, with fast-ramp control that keeps thermal overshoot out of the photoresist budget. The emitters use short-wave infrared to dump energy in fast, direct pulses, and the chamber is cleanroom-compatible to Class 1–100, holding particle generation at zero during bake and degas. Temperature repeatability stays tight cycle after cycle, so your critical bake profiles don’t wander when ambient swings or batch mix changes. Why this matters in lithography In lithography prep, that consistency translates to solid soft bake and hard bake, tighter CD control, and fewer rework lots. The quick infrared response shortens bake time, which can trim overall cycle time while still driving off solvent completely and keeping edge bead under control. Energy use falls because heat is delivered on demand, not held in a big hot mass. The hardware is built for 24/7, with predictable maintenance intervals so unplanned downtime stays off the production board. What you need to plan for These heaters integrate cleanly, but they do need stable voltage and cooling matched to the specified duty cycle. Expect a short commissioning window to dial in the ramp profile for your resist stack and substrate stack. Once it’s aligned, the process window stays tight — even when you push lot-to-lot throughput.

Degas on Cozy Corner Infrared Heating

Wafer degas infrared heater